The 11th National MOCVD Conference was held on January 12, 2010 in Suzhou, Jiangsu Province. The two-day conference was held with many experts and scholars. The main applications of this MOCVD discussion focused on LEDs, solar/laser. There are also many applications. The overall feeling of domestic MOCVD is that there are more people concerned and fewer people.
China's MOCVD development has mixed concerns
At present, China has made great progress in epitaxial growth manufacturing, epitaxially growing GaN materials on different substrates (Al2O3, Si, SiC, AiN), and has developed patterned substrate epitaxy, non-polar or semi-polar epitaxy, etc. In terms of internal quantum efficiency and external quantum efficiency, good research results have been achieved. AlGaN deep ultraviolet (260nm-400nm) light-emitting diodes have been developed, and 1W LED blue light chips have been developed. The luminous efficiency of LEDs made of white light exceeds 80lm/W. And developed a four-element AlGaInP red light power LED device, the luminous efficiency is about 40lm / W, Nanchang University developed a silicon substrate with independent intellectual property rights to grow GaN, and made blue and green LED chips.
Despite this, we have seen that the LED core epitaxial equipment is still in the early stage of development. In 2008, there were 135 MOCVD equipments in production in China. In 2009, MOCVD equipment will increase by about 100 units, but unfortunately, most of them Relying on imports, few domestically produced equipment, Dong Zhijiang, general manager of Wuhan Diyuan Optoelectronics Technology Co., Ltd. said, “The current high-power characteristic substrate technology for illumination, processing stability and the improvement rate of epitaxial efficiency are compared with those of foreign countries. The gap is gradually narrowing, but the current production of epitaxial equipment still relies mainly on imports, and the mainland market still lacks competitive domestic equipment."
We found that although our country started to develop MOCVD equipment as early as the 1980s, most of them have no news after launching the prototype, which has many reasons. Some experts believe that the investment is relatively scattered, unable to form a synergy, and the lack of market-oriented operation mode is the fundamental reason for the delay in mass production of domestic MOCVD equipment.
However, at this meeting, we are pleased to see that upstream raw materials and MOCVD equipment have been produced by manufacturers or units. For example, the MO source developed by Jiangsu Nanda has been widely used, the Institute of Semiconductors of the Chinese Academy of Sciences (7???2), Huazhong University of Science and Technology. (In cooperation with Zhaoxin Group), it has announced the development of new self-produced MOCVD equipment (but no mass production). Prior to this, Qingdao Jiesheng Optoelectronics and Xidian University also developed single-chip, 3??? 2" and 6???2" MOCVD equipment, and many units have shown great interest in the development of MOCVD equipment. It can be seen that many people have realized the challenges and huge problems brought about by the lack of MOCVD domestic equipment. Business.
Development of MOCVD equipment should focus on various resources
At this meeting, many experts and industry insiders expressed their views on the development of domestic MOCVD equipment. Researcher Gao Hongyi of Xi'an Institute of Optics and Mechanics, Chinese Academy of Sciences believes that the manufacture of MOCVD equipment is different from the manufacture of other industrial production equipment. The MOCVD equipment itself is A multidisciplinary, high-precision, high-risk, and mechanical and technical combination.
The knowledge of mechanics, optics, vacuum, gas power, chemistry, thermal field distribution, three-waste treatment, and electronic control used in the manufacturing process of MOCVD equipment is also a condition to be combined with engineers of MOCVD material growth processes. This will produce a qualified MOCVD device. Only those who know the craft can't do the equipment, and only the mechanical people can do this equipment. This is why some other equipments in China that do scientific research equipment are doing very well, but they have to make a MOCVD equipment separately. So easy, not even complete.
“So I think that in order to truly produce a fully versatile MOCVD equipment, it must be combined by the equipment factory and MOCVD process personnel. One way is for the equipment factory to hire technicians to turn the craftsman into one of the equipment manufacturers. It is the cooperation between the equipment factory and the unit that is doing the process. The equipment is put into the unit of the process, and the equipment is continuously provided. The defects of the equipment and the areas for improvement are also found, and the growth of the materials is also summarized. Process, provide reference for the improvement of control software." Gao Hongyi said.
Some experts at the meeting believed that key equipment such as MOCVD is a matter that reflects the will of the country. The state must vigorously invest and fully support it. In addition to the entire system, we must also pay attention to the manufacturing and supporting capabilities of key components, such as high-purity high-quality graphite, crystal material parts, stainless steel materials and components, surface treatment of materials, as well as pressure, flow, temperature detection, each A vacuum pump or the like is indispensable for MOCVD.
MOCVD equipment is the most critical equipment for the development of the LED industry. It plays an important role in the development of the LED industry. The relevant national departments should focus on the talents and resources of the units that develop MOCVD equipment, and “break the existing situation of scattered sand and separate government†and concentrate on investment. Focus on development, solve key technologies in manufacturing equipment, master core technologies with independent property rights, and realize localized mass production of MOCVD equipment as soon as possible. Only in this way will we accelerate the development of the LED industry and reduce the cost of LED-related products to achieve greater industrial development.
When visiting the optical expert and director of the Precision Optics Engineering Center of Suzhou University, Mr. Yu Jingchi, they also saw their successful examples in the development of domestic optical core processing equipment. The experience is worth learning from the MOCVD industry. Mr. Yu Jingchi revealed that they are currently cooperating with Suzhou University, Harbin Institute of Technology, Xi'an Jiaotong University and other resources to form a company. The company brings together experts from domestic optics, precision machinery and electronics to actively tackle the domestic optical core processing equipment (aspherical surface). "At present, the prototype has been developed, and the next step is how to improve it better."
summary
We believe that the successful operation of MOCVD domestic projects will drive the development and progress of a large number of supporting industries. Of course, the success of localization of key equipment such as MOCVD must mean that the cost of LEDs is reduced, and the localization of key equipment will greatly reduce the manufacturing cost of LEDs. However, even if domestically produced equipment comes out, it faces the problem that enterprises are reluctant to adopt domestically produced equipment. Many experts have called on domestic enterprises and research institutes to “boldly use domestic MOCVD equipment,†the development of MOCVD business is all industries. The only thing that can make the domestic LED industry enter a benign development track.
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